The Cambridge NanoTech Fiji series is a modular, high-vacuum ALD system  accommodates a wide range of deposition modes using a flexible system architecture and multiple configurations of precursors and plasma gases. The result is a next-generation ALD platform capable of performing thermal and plasma-enhanced deposition.

Cambridge NanoTech has applied advanced computational fluid dynamics analyses to optimize the Fiji reactor, heater, and trap geometry

The system’s intuitive interface makes it easy to monitor and change recipes and processes as needed. The Fiji can also be configured with an optional loadlock or glovebox. 

The Fiji is available in several different configurations, including Dual Chamber and Load Lock. Each chamber can be configured with up to six precursor lines that can accommodate solid, liquid or gas precursors, and five plasma gas lines, offering significant experimental flexibility in a compact footprint. Please let us know what your ALD needs are and we’d be glad to configure a Fiji system that is right for you.