Uniformity over large substrates, reproducibility and low temperature deposition make ALD an ideal candidate for the next generation of large-scale manufacturing thin film technology. Cambridge NanoTech has perfected ALD as a maufacturing-grade technology by simply scaling up the process and implementing it into automation lines and cluster tools around the world. Manufacturers that have integrated Cambridge NanoTech ALD systems have seen increased product quality and reliability as well as decreased operating costs and a greener footprint as compared to previous coating technologies.
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If you have production ALD needs, then the Phoenix system is the right choice. The Phoenix is a batch ALD tool capable of holding a large number of substrates at one time. Its unique chamber design assures accurate films from batch to batch and shortens maintenance time to under one hour. |
The Tahiti System is engineered for large-area manufacturing operations and balances the complex needs of high-volume performance and precise films in an economical package. |