Founded in 2003, Cambridge NanoTech grew directly out one of the foremost ALD research groups in the world: the Gordon Lab at Harvard University. With hundreds of systems shipped for research and development, Cambridge NanoTech is the leading ALD supplier to academic and industrial institutions worldwide.

With our production ALD and plasma-enhanced ALD systems we continue to expand our product offerings to meet customer needs. Our Savannah family of systems has been so successful that they have been used to produce more than several hundred peer reviewed papers. We followed this success with the introduction of the Phoenix production ALD system. Phoenix systems have been up and running in the United States and Asia since 2008. 

If you are interested in our innovative ALD products, please contact a distributor in your region or contact Jill. Please check our News and Events section to see if we are appearing at a conference near you.