|
With over 150 systems shipped worldwide, the Savannah family is the standard for ALD research and development. The Savannah combines ease of use and great experimental flexibility into a compact, inexpensive package. The Savannah family of systems is the perfect place to start if you are looking for an affordable, reliable ALD research system. |
If your needs are more advanced and you require even more experimental flexibility, then the Fiji is the system to fit your needs. The Fiji is modular and can be customized to fit your particular needs. It comes with a plasma generator to enable plasma-enhanced ALD and can be configured for cleanroom compatibility and comes with an optional loadlock. |
If you have production ALD needs, then the Phoenix system is the right choice. The Phoenix is a batch ALD tool capable of holding a large number of substrates at one time. Its unique chamber design assures accurate films from batch to batch and shortens maintenance time to under one hour. |
|
The Tahiti System is engineered for large-area manufacturing operations and balances the complex needs of high-volume performance and precise films in an economical package. |
One size doesn't fit all. We understand that and pride ourselves on working consultatively with our customers to find and implement the solution that is right for their thin film needs. |