Electronics

As a low-cost, thin film deposition technique, ALD is capable of depositing flexible, multi-functional materials at low deposition temperatures.  With excellent electrical, optical and encapsulation properties, these materials are perfectly suited for integration into flexible electronics, displays and sensors, including:

  • Encapsulation barriers
  • Diffusion barriers
  • DRAM
  • Etch resistance
  • Gate dielectrics
  • Gate electrodes
  • Hydro-phobic/anti-stiction
  • Magnetic heads
  • MEMs and NEMs
  • Metal interconnects
  • Multi-layer capacitors
  • RFID
200 OK

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