Cambridge NanoTech’s ALD research systems are designed by ALD scientists and are built for maximum experimental flexibility and value. With universal precursor delivery systems, researchers can use solid, liquid or gas chemistries in any precursor port. Many options to choose from including ozone generators, in-situ monitoring and various configurations. As always, our team of ALD experts are ready to answer your recipe development and film characterization questions. Over 170+ published academic papers feature research performed on Cambridge NanoTech’s Savannah thermal ALD system and Fiji plasma ALD system.
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With over 150 systems shipped worldwide, the Savannah family is the standard for ALD research and development. The Savannah combines ease of use and great experimental flexibility into a compact, inexpensive package. The Savannah family of systems is the perfect place to start if you are looking for an affordable, reliable ALD research system. |
your needs are more advanced and you require even more experimental flexibility, then the Fiji is the system to fit your needs. The Fiji is modular and can be customized to fit your particular needs. It comes with a plasma generator to enable plasma-enhanced ALD and can be configured for cleanroom compatibility and comes with an optional loadlock. |