Atomic Layer Deposition Systems

Savannah

Our Savannah series of thin film deposition systems has become the standard for ALD research and development. Savannah combines ease of use and great experimental flexibility into a compact, inexpensive package. The Savannah ALD system can deposit a wide range of thin films such as oxides, nitrides, sulfides as well as Self Assembling Monolayer in the same reactor.

Savannah series is ideal if you are looking for an affordable, reliable ALD system.

Fiji

Our Fiji series is ideal when the needs for thin film deposition systems are more advanced and require broader experimental flexibility.

Fiji is a plasma enhanced ALD system utilizing a high vacuum turbo based design with many configurable options such as automated load lock, in-situ diagnostics for Ellipsometry, Quart Crystal Microbalance (QCM), Optical Emissions Spectrometry (OES) and others.

Fiji series is the ALD system for the serious researcher looking to deposit some of the most difficult and challenging films available.

Phoenix

Our Phoenix system is the right choice when production ALD is a requirement. The Phoenix is a large batch ALD tool capable of holding a large number of substrates at one time or very large 3D objects.

Its unique chamber design assures accurate conformal coating from batch-to-batch and shortens maintenance time. It’s designed for the stringent requirements of the production world where reliability and safety are critical.

 

Which system is right for you?

  Savannah
Savannah
Fiji
Fiji
Phoenix
Phoenix
Thermal Deposition Standard Standard Standard
Plasma Enhanced Deposition Optional Standard Not Available
Small Batch Thermal Deposition Optional Not Available Standard
Large Batch Thermal Deposition Not Available Not Available Standard
 

Common features across systems

Whether your needs are low cost starter thermal tools, plasma enhanced systems with many integrated options and features, or a production system used 24x7, the common features are; simple user interface, quality built CE compliant platforms, Class 100 clean room compliant and all with a roadmap to meet the future ALD needs of tomorrow. We pride ourselves on being on the leading edge of ALD research. Our scientists and support personnel are all seasoned veterans of ALD.