ALD Advantages

ALD Advantages

The most significant advantages of thin film deposition via Atomic Later Deposition over other methods, are manifest in four distinct areas – film conformality, low temperature processing, stoichiometric control, and inherent film quality associated with the self-limiting, and self-assembled nature of the ALD mechanism ALD is exceptionally effective at coating surfaces that exhibit ultra high aspect ratio topographies, as well as surfaces requiring multilayer films with good quality interfaces technology.

 

ALD for highly controllable thin films

  • Film thickness based on self-limiting, self assembled behavior, with nanometer level control
  • Stoichiometric control of multicomponent films
  • Films/Processes scalable over very large areas
  • Excellent repeatability
  • Wide process windows (with respect to temperature or precursor dose variations)
  • Low defect density
  • Amorphous or crystalline film types depending on substrate and temperature
  • Fine control of multilayer coatings, heterostructures, nanolaminates, mixed oxides, graded index layers, and doping
  • Standard recipes available for oxides, nitrides, metals, and semiconductors

 

Cu2S/SnS2/ZnS trilayer deposited in silicon trench. CZST film composition profile is analyzed by SIMS following different thermal anneals.
Ref: Thimsen et al, Chemistry of Materials, 24 (16), 3188-3196 (2013). doi:10.1021/cm3015463

 

ALD for highly controllable thin films

  • Excellent conformality, 100% step coverage: uniform coatings on flat, inside porous, and around particle samples
  • Atomically flat and smooth coating that conforms to the substrate geometry

 

Conformal deposition of Li5.1TaOz deposited by ALD in 300:1 AAO nanotemplate (470:1 final AR)
Ref: Liu, J. et al., J. Phys. Chem. C 117, 20260–20267 (2013).

 

ALD for challenging substrate

  • Gentle deposition process for sensitive substrates
  • Low temperature deposition possible (RT-800 °C)
  • Low power plasma processing (as low as 20-50W) capability
  • Coatings demonstrated on polymers, OLEDs, and noble metal surfaces
  • Excellent adhesion due to chemical bonds at the first layer
  • Low stress due to molecular self-assembly

 

Al2O3 – ZrO2 nanolaminate encapsulation with a water transmission rate (WVTR) of 5E-7g/m2/day at room temperature – deposited in Savannah at 80˚C
Ref: Meyer, J., et al. (2009). Applied Physics Letters, 94(23), 233305