A Periodic Table of Elements for Atomic Layer Deposition

ALD Applications
O: Oxide
N: Nitride
M: Metal
P: Phosphide/Asenide
S: Sulfide/Selenide/Telluride
C: Carbide
F: Fluoride
D: Dopant
{{datum.Symbol}}
{{datum.Number}}
{{datum.pt11.letter}}
{{datum.pt12.letter}}
{{datum.pt13.letter}}
{{datum.pt21.letter}}
{{datum.pt23.letter}}
{{datum.pt31.letter}}
{{datum.pt32.letter}}
{{datum.pt33.letter}}
{{datum.Name}} ({{datum.Symbol}} {{datum.Number}})

{{datum.pt11.letter}} {{datum.pt12.letter}} {{datum.pt13.letter}} {{datum.pt21.letter}} {{datum.pt23.letter}} {{datum.pt31.letter}} {{datum.pt32.letter}} {{datum.pt33.letter}}

{{datum.ALD}}
{{datum.Comment}}